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文件名称：a MEMS-IDT gyroscope
文件大小：681KB
文件格式：PDF
更新时间：2013-01-02 04:13:10
Design and development of a
Thedesign,developmentandperformanceevaluationofanovelradiofrequency
microelectromechanicalsystems(MEMS)gyroscope,basedonasurfaceacousticwave
resonator(SAWR)andasurfaceacousticwavesensorispresentedinthispaper.Mostofthe
MEMSgyroscopesbasedonsiliconvibratorystructuresthatutilizetheenergytransfer
betweenthetwovibratorymodesdemandsmallfabricationtolerancestominimizesignal
outputwhenthereisnorotation(i.e.zerorateoutput).This1cm × 1cmgyroscopeoperates
basedontheprincipleofasurfaceacousticwave(SAW)onapiezoelectricsubstrate.The
SAWRcreatesSAWstandingwaveswithinthecavityspacebetweentheinterdigital
transducers(IDTs).Theparticlesattheanti-nodesofastandingwaveexperiencelarge
amplitudesofvibrationperpendiculartotheplaneofthesubstrate,whichservesasthe
referencevibratingmotionforthisgyroscope.